What are the advantages of Real Time particle monitoring?
February 2, 2012 by Renzo - Excellent for sensitive monitoring at lower detection limits > 0.1 micron
- Provides continuous detection of all particle events
- Works well for equipment monitoring for failure and preventative maintenance at higher detection limits > 0.2 micron
- Provides immediate notification of yield destroying particle excursions
- Allows for emergency reaction to particle events
- Provides immediate feedback after shut down to verify of the area is in spec